Design of Periodic Structures in a Multiple Beam Interference Scheme
نویسندگان
چکیده
Based on holographic interferometry technique, we develop an alternative method for micrometer-sized periodic structures design. The optical setup with 2D spatial light modulator for periodic structures generation is presented. It is shown that this innovative method made possible the rapid generation of periodic structures employing diffractive masks and phase modulation based on multiple beam interference. The designed interference pattern can be formed by controlling the computed greyscale masks parameters. In this work, basic patterns of interference are investigated in case of three-beam correlation. This technique can be used to control the interference pattern distribution based on multiple beams for ultra-fast micron and sub-micron lithography experiments.
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